MATRIX ATOMIC LOSSES AND OXYGEN INCORPORATION UNDER RUBY-LASER IRRADIATION OF SILICON IN GASEOUS ATMOSPHERES

被引:19
作者
BERTI, M
DALLEROSE, LFD
DRIGO, AV
COHEN, C
SIEJKA, J
BENTINI, GG
JANNITTI, E
机构
[1] UNIV PARIS 07,ECOLE NORMALE SUPER,PHYS SOLIDES GRP,F-75251 PARIS 05,FRANCE
[2] CNR,IST LAB CHIM & TECN MAT ELETTR,I-40126 BOLOGNA,ITALY
[3] CNR,CTR GAS IONIZZATI,I-35100 PADUA,ITALY
[4] MINIST PUBBL ISTRUZ,CONSORZIO INTERUNIV STRUTURA MAT,I-35131 PADOVA,ITALY
来源
PHYSICAL REVIEW B | 1986年 / 34卷 / 04期
关键词
D O I
10.1103/PhysRevB.34.2346
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2346 / 2359
页数:14
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