DIFFERENCES BETWEEN LAB6 AND CEB6 BY MEANS OF SPECTROSCOPIC ELLIPSOMETRY

被引：24

作者：

VANDERHEIDE, PAM

TENCATE, HW

TENDAM, LM

DEGROOT, RA

DEVROOMEN, AR

机构：

来源：

JOURNAL OF PHYSICS F-METAL PHYSICS | 1986年 / 16卷 / 10期

关键词：

D O I：

10.1088/0305-4608/16/10/026

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1617 / 1623

页数：7

共 20 条

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