LEAD PHTHALOCYANINE THIN-FILMS FOR NO2 SENSORS

The deposition of phthalocyanines is widely used to get active thin films for sensors. We have developed deposition procedures to prepare nearly pure monoclinic and triclinic modifications of lead phthalocyanine on different substrates. Difficulties tend to arise under circumstances where mixtures of these two modifications are present. Therefore we have used different methods like FTIR and IR spectroscopy X-ray diffraction to get reliable results. Thin films are prepared on comb-like electrode systems. The NO2 sensor shows defined behaviour for its characteristics and sensitivity depending on the temperature, applied voltage, humidity and annealing conditions. Two applications are given in the emission region of NO2 concentration.