GAEDE-LANGMUIR LECTURE - STATIC SIMS APPLICATIONS - FROM SILICON SINGLE-CRYSTAL OXIDATION TO DNA SEQUENCING

被引：62
作者：
BENNINGHOVEN, A
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.573015
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：451 / 460
页数：10
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