SCANNING AUGER-ELECTRON MICROSCOPY AT 30 NM RESOLUTION

被引：47

作者：

VENABLES, JA ^{[1
]}

JANSSEN, AP ^{[1
]}

HARLAND, CJ ^{[1
]}

JOYCE, BA ^{[1
]}

机构：

[1] UNIV SUSSEX,SCH MATH & PHYS SCI,BRIGHTON BN1 9QH,SUSSEX,ENGLAND

来源：

PHILOSOPHICAL MAGAZINE | 1976年 / 34卷 / 03期

关键词：

D O I：

10.1080/14786437608222040

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：495 / 500

页数：6

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[2]

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[3]

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[4]

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[5]

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[6]

LEGRESSUS C, 1975, CR ACAD SCI B PHYS, V280, P439

[7]

MCDONALD NC, 1971, IITRI SCANNING ELECT, P89

[8] HIGH-SPATIAL RESOLUTION AUGER-SPECTROSCOPY AND AUGER INTEGRATION APPLICATIONS [J].

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HAAS, TW .

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[9] SCANNING AUGER-ELECTRON MICROSCOPE FOR SURFACE STUDIES [J].

POWELL, BD ;

WOODRUFF, DP ;

GRIFFITHS, BW .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1975, 8 (07) :548-552

[10] AUGER-ELECTRON SPECTROSCOPY AT HIGH SPATIAL-RESOLUTION AND NA PRIMARY BEAM CURRENTS [J].

TODD, G ;

POPPA, H ;

MOORHEAD, D ;

BALES, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04) :953-955

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