IMPEDANCE SPECTROSCOPY ON SI-BASED CHEMICAL SENSORS WITH LANGMUIR-BLODGETT-FILMS

被引:7
作者
ERBACH, R
HOFFMANN, B
VOGEL, A
机构
[1] Universität Karlsruhe, Institut für Technologie der Elektrotechnik, D-7500 Karlsruhe 21
关键词
D O I
10.1016/0925-4005(91)80139-B
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The use of modern impedance spectroscopy (IS) is demonstrated by measurements on chemical sensors with electrolyte/membrane + insulator/silicon structures using Langmuir - Blodgett membranes (ELBOS system). The build-up of the electrical potentials directly at the electrolyte/membrane and insulator/silicon interfaces is deduced from the measurements. For this purpose the ELBOS system is systematically divided into different parts which together can describe the sensor system. The comparison of a pH-sensitive membrane with an almost pH-insensitive membrane gives a better understanding of the distribution of the potentials.
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页码:379 / 384
页数:6
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