HIGH-PERFORMANCE THIN-FILM SILICON-ON-INSULATOR CMOS TRANSISTORS IN POROUS ANODIZED SILICON

被引:14
|
作者
THOMAS, NJ
DAVIS, JR
KEEN, JM
CASTLEDINE, JG
BRUMHEAD, D
GOULDING, M
ALDERMAN, J
FARR, JPG
EARWAKER, LG
LECUYER, J
STIRLAND, IM
COLE, JM
机构
[1] PLESSEY RES CASWELL LTD,TOWCESTER,NORTHANTS,ENGLAND
[2] ROYAL SIGNALS & RADAR ESTAB,MALVERN WR14 3PS,WORCS,ENGLAND
[3] UNIV BIRMINGHAM,BIRMINGHAM B15 2TT,W MIDLANDS,ENGLAND
关键词
D O I
10.1109/55.31691
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:129 / 131
页数:3
相关论文
共 50 条
  • [1] HIGH-PERFORMANCE FULLY DEPLETED SILICON-ON-INSULATOR TRANSISTORS
    MACELWEE, TW
    CALDER, ID
    BRUCE, RA
    SHEPHERD, FR
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1990, 37 (06) : 1444 - 1451
  • [2] SILICON-ON-INSULATOR APPROACH FOR POWER ICS INTEGRATING VERTICAL DMOS AND POLYCRYSTALLINE-SILICON CMOS THIN-FILM TRANSISTORS
    DOLNY, GM
    IPRI, AC
    NOSTRAND, GE
    WHEATLEY, CF
    WODARCZYK, PJ
    IEEE ELECTRON DEVICE LETTERS, 1992, 13 (10) : 516 - 518
  • [3] Laser crystallization of silicon for high-performance thin-film transistors
    Dassow, R
    Köhler, JR
    Helen, Y
    Mourgues, K
    Bonnaud, O
    Mohammed-Brahim, T
    Werner, JH
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2000, 15 (10) : L31 - L34
  • [4] Thin-film metrology of silicon-on-insulator materials
    Zollner, S
    Lee, TC
    Noehring, K
    Konkar, A
    Theodore, ND
    Huang, WM
    Monk, D
    Wetteroth, T
    Wilson, SR
    Hilfiker, JN
    APPLIED PHYSICS LETTERS, 2000, 76 (01) : 46 - 48
  • [5] Analysis and optimization of lateral thin-film Silicon-on-insulator (SOI) MOSFET transistors
    Cortes, I.
    Toulon, G.
    Morancho, F.
    Hugonnard-Bruyere, E.
    Villard, B.
    Toren, W. J.
    MICROELECTRONICS RELIABILITY, 2012, 52 (03) : 503 - 508
  • [6] A Sputtered Silicon Oxide Electrolyte for High-Performance Thin-Film Transistors
    Ma, Xiaochen
    Zhang, Jiawei
    Cai, Wensi
    Wang, Hanbin
    Wilson, Joshua
    Wang, Qingpu
    Xin, Qian
    Song, Aimin
    SCIENTIFIC REPORTS, 2017, 7
  • [7] A Sputtered Silicon Oxide Electrolyte for High-Performance Thin-Film Transistors
    Xiaochen Ma
    Jiawei Zhang
    Wensi Cai
    Hanbin Wang
    Joshua Wilson
    Qingpu Wang
    Qian Xin
    Aimin Song
    Scientific Reports, 7
  • [8] A TECHNOLOGY FOR HIGH-PERFORMANCE SINGLE-CRYSTAL SILICON-ON-INSULATOR TRANSISTORS
    SPANGLER, LJ
    WISE, KD
    IEEE ELECTRON DEVICE LETTERS, 1987, 8 (04) : 137 - 139
  • [9] HIGH-PERFORMANCE THIN-FILM TRANSISTORS FROM OPTIMIZED POLYCRYSTALLINE SILICON FILMS
    MEAKIN, DB
    COXON, PA
    MIGLIORATO, P
    STOEMENOS, J
    ECONOMOU, NA
    APPLIED PHYSICS LETTERS, 1987, 50 (26) : 1894 - 1896
  • [10] Device characteristics of the thin-film silicon-on-insulator power MOSFETs at high temperatures
    Ishibashi, Tsubasa
    Morisawa, Yuka
    Matsumoto, Satoshi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2014, 53 (06)