ATOMIC LAYER EPITAXY OF CUBIC SIC BY GAS SOURCE MBE USING SURFACE SUPERSTRUCTURE

被引:52
作者
FUYUKI, T
NAKAYAMA, M
YOSHINOBU, T
SHIOMI, H
MATSUNAMI, H
机构
关键词
D O I
10.1016/0022-0248(89)90442-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:461 / 463
页数:3
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