ATOMIC LAYER EPITAXY OF CUBIC SIC BY GAS SOURCE MBE USING SURFACE SUPERSTRUCTURE

被引：52

作者：

FUYUKI, T

NAKAYAMA, M

YOSHINOBU, T

SHIOMI, H

MATSUNAMI, H

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 95卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(89)90442-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：461 / 463

页数：3

共 7 条

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