A REVIEW OF LASER-BEAM APPLICATIONS FOR PROCESSING SILICON

[1] LASER CHEMICAL VAPOR-DEPOSITION - A TECHNIQUE FOR SELECTIVE AREA DEPOSITION [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) : 6501 - 6505

[2] CW ARGON-LASER ANNEALING OF ION-IMPLANTED SILICON [J]. APPLIED PHYSICS LETTERS, 1978, 33 (06) : 539 - 541

[3] DYNAMICS OF Q-SWITCHED LASER ANNEALING [J]. APPLIED PHYSICS LETTERS, 1979, 34 (11) : 777 - 779

[4] EXPLOSIVE CRYSTALLIZATION OF A-SI FILMS IN BOTH THE SOLID AND LIQUID-PHASES [J]. APPLIED PHYSICS LETTERS, 1981, 39 (09) : 724 - 726

[5] BAERI P, 1980, PHYS REV LETT, V45, P1036

[6] STRUCTURE TRANSITIONS IN AMORPHOUS SILICON UNDER LASER IRRADIATION [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) : 259 - 265

[7] LASER-INDUCED MELT DYNAMICS OF SI AND SILICA [J]. PHYSICAL REVIEW LETTERS, 1981, 47 (16) : 1151 - 1155

[8] OXIDATION OF SILICON SURFACES BY CO2-LASERS [J]. APPLIED PHYSICS LETTERS, 1982, 41 (02) : 162 - 164

[9] BROWN W, 1979, LASER ELECTRON BEAM, P20

[10] Brown W. L., 1981, Laser and Electron-Beam Solid Interactions and Materials Processing. Proceedings of the Materials Research Society Symposium, P1

[1] LASER CHEMICAL VAPOR-DEPOSITION - A TECHNIQUE FOR SELECTIVE AREA DEPOSITION [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) : 6501 - 6505

[2] CW ARGON-LASER ANNEALING OF ION-IMPLANTED SILICON [J]. APPLIED PHYSICS LETTERS, 1978, 33 (06) : 539 - 541

[3] DYNAMICS OF Q-SWITCHED LASER ANNEALING [J]. APPLIED PHYSICS LETTERS, 1979, 34 (11) : 777 - 779

[4] EXPLOSIVE CRYSTALLIZATION OF A-SI FILMS IN BOTH THE SOLID AND LIQUID-PHASES [J]. APPLIED PHYSICS LETTERS, 1981, 39 (09) : 724 - 726

[5] BAERI P, 1980, PHYS REV LETT, V45, P1036

[6] STRUCTURE TRANSITIONS IN AMORPHOUS SILICON UNDER LASER IRRADIATION [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) : 259 - 265

[7] LASER-INDUCED MELT DYNAMICS OF SI AND SILICA [J]. PHYSICAL REVIEW LETTERS, 1981, 47 (16) : 1151 - 1155

[8] OXIDATION OF SILICON SURFACES BY CO2-LASERS [J]. APPLIED PHYSICS LETTERS, 1982, 41 (02) : 162 - 164

[9] BROWN W, 1979, LASER ELECTRON BEAM, P20

[10] Brown W. L., 1981, Laser and Electron-Beam Solid Interactions and Materials Processing. Proceedings of the Materials Research Society Symposium, P1