REDISTRIBUTION OF DOPANTS IN TISI2-POLYCRYSTALLINE BILAYERS DURING HEAT-TREATMENT

被引:22
作者
NORSTROM, H [1 ]
RUNOVC, F [1 ]
BUCHTA, R [1 ]
WIKLUND, P [1 ]
OSTLING, M [1 ]
PETERSSON, CS [1 ]
机构
[1] UNIV UPPSALA,INST TECHNOL,S-75121 UPPSALA,SWEDEN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期
关键词
D O I
10.1116/1.571948
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:463 / 464
页数:2
相关论文
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[5]   TITANIUM DISILICIDE IN MOS TECHNOLOGY [J].
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