BACKSCATTERING SPECTROMETRY ON AR SPUTTER-DEPOSITED FILMS

被引：0
作者：
KAZAMA, NS
FUJIMORI, H
机构：
来源：
SCIENCE REPORTS OF THE RESEARCH INSTITUTES TOHOKU UNIVERSITY SERIES A-PHYSICS CHEMISTRY AND METALLURGY | 1983年 / 31卷 / 01期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：16 / 27
页数：12
相关论文
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Chu WK., 1978, BACKSCATTERING SPECT
[2]  
GREER AL, 1981, 4TH P INT C RAP QUEN, P567
[3]  
KAZAMA NS, 1982, UNPUB 10TH INT C MAG
[4]   DIFFUSION AND STRUCTURAL RELAXATION IN COMPOSITIONALLY MODULATED AMORPHOUS METAL-FILMS [J].
ROSENBLUM, MP ;
SPAEPEN, F ;
TURNBULL, D .
APPLIED PHYSICS LETTERS, 1980, 37 (02) :184-186
[5]  
YAMAGUCHI S, 1981, B JAPAN I METALS, V20, P629
[6]  
ZIEGLER JF, 1977, STOPPING RANGES ION, V4
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