BEAM ANNEALING OF SEMICONDUCTOR-MATERIALS

被引：4
作者：
SEALY, BJ
机构：
来源：
PHYSICS IN TECHNOLOGY | 1984年 / 15卷 / 01期
关键词：
D O I：
10.1088/0305-4624/15/1/I04
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：23 / 29
页数：7
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