BEAM ANNEALING OF SEMICONDUCTOR-MATERIALS

被引：4

作者：

SEALY, BJ

机构：

来源：

PHYSICS IN TECHNOLOGY | 1984年 / 15卷 / 01期

关键词：

D O I：

10.1088/0305-4624/15/1/I04

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：23 / 29

页数：7

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