DEGRADATION OF POLY(METHYL METHACRYLATE) IN CF4 AND CF4/O2 PLASMAS

被引：17
|
作者：
WU, BJ [1 ]
HESS, DW [1 ]
SOONG, DS [1 ]
BELL, AT [1 ]
机构：
[1] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720
来源：
JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 04期
关键词：
D O I：
10.1063/1.332224
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1725 / 1729
页数：5
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