DEGRADATION OF POLY(METHYL METHACRYLATE) IN CF4 AND CF4/O2 PLASMAS

被引：17

作者：

WU, BJ ^{[1
]}

HESS, DW ^{[1
]}

SOONG, DS ^{[1
]}

BELL, AT ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 04期

关键词：

D O I：

10.1063/1.332224

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1725 / 1729

页数：5

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