EFFECT OF ANNEALING ON STRUCTURAL AND ELECTRONIC-PROPERTIES OF PROFILED SILICON

被引:0
作者
ABROSIMOV, NV
BAZHENOV, AV
GONCHAROV, VA
EROFEEVA, SA
机构
来源
IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA | 1983年 / 47卷 / 02期
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中图分类号
O4 [物理学];
学科分类号
0702 ;
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页码:356 / 360
页数:5
相关论文
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GATOS, HC ;
LAGOWSKI, J .
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[5]  
VLACHAVAS D, 1980, I PHYS C SER, V52, pCH3
[6]   STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF CRYSTALLOGRAPHIC DEFECTS IN SILICON RIBBONS [J].
YANG, K ;
SCHWUTTKE, GH ;
CISZEK, TF .
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