FERROELECTRIC MATERIALS FOR 64 MB AND 256 MB DRAMS

被引：221
作者：
PARKER, LH
TASCH, AF
机构：
[1] Electrical Engineering, University of Texas, Austin
来源：
IEEE CIRCUITS AND DEVICES MAGAZINE | 1990年 / 6卷 / 01期
关键词：
D O I：
10.1109/101.47582
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Storing enough charge on the capacitors in the memory cells of ULSI DRAMs will require materials with much higher relative dielectric constants than those being used today. Some ferroelectric materials look promising. © 1990, IEEE. All rights reserved.
引用
收藏
页码：17 / 26
页数：10
相关论文
共 102 条
[1]  
Adachi H., 1983, Japanese Journal of Applied Physics, Supplement, V22, P11
[2]   ELECTROOPTIC EFFECTS OF (PB, LA)(ZR, TI)O3 THIN-FILMS PREPARED BY RF PLANAR MAGNETRON SPUTTERING [J].
ADACHI, H ;
KAWAGUCHI, T ;
SETSUNE, K ;
OHJI, K ;
WASA, K .
APPLIED PHYSICS LETTERS, 1983, 42 (10) :867-868
[3]   FERROELECTRIC (PB,LA)(ZR,TI)O3 EPITAXIAL THIN-FILMS ON SAPPHIRE GROWN BY RF-PLANAR MAGNETRON SPUTTERING [J].
ADACHI, H ;
MITSUYU, T ;
YAMAZAKI, O ;
WASA, K .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) :736-741
[4]   SPUTTER-DEPOSITION OF [111]-AXIS ORIENTED RHOMBOHEDRAL PZT FILMS AND THEIR DIELECTRIC, FERROELECTRIC AND PYROELECTRIC PROPERTIES [J].
ADACHI, M ;
MATSUZAKI, T ;
YAMADA, T ;
SHIOSAKI, T ;
KAWABATA, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (04) :550-553
[5]   EFFECTS OF AMBIENT ATMOSPHERE ON THE STABILITY OF BARIUM TITANATE [J].
ANDERSON, JR ;
BRADY, GW ;
MERZ, WJ ;
REMEIKA, JP .
JOURNAL OF APPLIED PHYSICS, 1955, 26 (11) :1387-1388
[6]   ANALYSIS OF SWITCHING TRANSIENTS IN KNO3 FERROELECTRIC MEMORIES [J].
ARAUJO, C ;
SCOTT, JF ;
GODFREY, RB ;
MCMILLAN, L .
APPLIED PHYSICS LETTERS, 1986, 48 (21) :1439-1440
[7]   DIELECTRIC-PROPERTIES OF FINE-GRAINED BARIUM-TITANATE CERAMICS [J].
ARLT, G ;
HENNINGS, D ;
DEWITH, G .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (04) :1619-1625
[8]   THE ROLE OF DOMAIN-WALLS ON THE DIELECTRIC, ELASTIC AND PIEZOELECTRIC PROPERTIES OF FERROELECTRIC CERAMICS [J].
ARLT, G .
FERROELECTRICS, 1987, 76 (3-4) :451-458
[9]   AGING IN TETRAGONAL FERROELECTRIC BARIUM TITANATE [J].
BRADT, RC ;
ANSELL, GS .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1969, 52 (04) :192-&
[10]  
Burfoot J.C., 1967, FERROELECTRICS INTRO
12345678910