TEMPORALLY RESOLVED LASER DIAGNOSTIC MEASUREMENTS OF ATOMIC-HYDROGEN CONCENTRATIONS IN RF PLASMA DISCHARGES

被引：21
|
作者：
PREPPERNAU, BL
DOLSON, DA
GOTTSCHO, RA
MILLER, TA
机构：
来源：
PLASMA CHEMISTRY AND PLASMA PROCESSING | 1989年 / 9卷 / 02期
关键词：
D O I：
10.1007/BF01054278
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：157 / 164
页数：8
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