共 14 条
[2]
IMPURITY REDISTRIBUTION AND JUNCTION FORMATION IN SILICON BY THERMAL OXIDATION
[J].
BELL SYSTEM TECHNICAL JOURNAL,
1960, 39 (04)
:933-946
[3]
CARSLAW HS, 1959, CONDUCTION HEAT SOLI, P19
[4]
DRURY T, 1963, PHYS CHEM GLASSES-B, V4, P79
[6]
GATOS HC, 1960, PROPERTIES ELEMENTAL, P121
[7]
GROVE AS, 1964, J APPL PHYS
[8]
KEONJIAN E, 1963, MICROELECTRONICS, pCH5
[10]
MOORE GE, 1963, MICROELECTRONICS, pCH5