GENERATION OF POSITIVE CHARGE IN SILICON DIOXIDE DURING AVALANCHE AND TUNNEL ELECTRON INJECTION

被引:136
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FISCHETTI, MV
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10.1063/1.335223
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O59 [应用物理学];
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页码:2860 / 2879
页数:20
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[1]  
AITKEN JM, 1976, IEEE T NUCL SCI, V23, P1526, DOI 10.1109/TNS.1976.4328533
[2]   ELECTRON TRAPPING BY RADIATION-INDUCED CHARGE IN MOS DEVICES [J].
AITKEN, JM ;
YOUNG, DR .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (03) :1196-1198
[3]   CURRENT INDUCED TRAP GENERATION IN SIO2 [J].
BADIHI, A ;
EITAN, B ;
COHEN, I ;
SHAPPIR, J .
APPLIED PHYSICS LETTERS, 1982, 40 (05) :396-398
[4]   ULTRAVIOLET BLEACHING AND REGENERATION OF SI=SI3 CENTERS AT THE SI/SIO2 INTERFACE OF THINLY OXIDIZED SILICON-WAFERS [J].
CAPLAN, PJ ;
POINDEXTER, EH ;
MORRISON, SR .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (01) :541-545
[5]  
Chang C., 1983, International Electron Devices Meeting 1983. Technical Digest, P194
[6]  
CHENG MC, 1983, MAR APS M LOS ANG
[7]   A MODEL FOR FIELD-SENSITIVE INTERFACE STATES [J].
CROWLEY, JL ;
HOFFMAN, HJ ;
STULTZ, TJ .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) :6919-6926
[8]   ELECTRON TRAPPING AND DETRAPPING CHARACTERISTICS OF ARSENIC-IMPLANTED SIO2 LAYERS [J].
DEKEERSMAECKER, RF ;
DIMARIA, DJ .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (02) :1085-1101
[9]   HOLE TRAPPING IN THE BULK OF SIO2 LAYERS AT ROOM-TEMPERATURE [J].
DEKEERSMAECKER, RF ;
DIMARIA, DJ .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (01) :532-539
[10]   LOCATION OF POSITIVE CHARGES IN SIO2-FILMS ON SI GENERATED BY VUV PHOTONS, X-RAYS, AND HIGH-FIELD STRESSING [J].
DIMARIA, DJ ;
WEINBERG, ZA ;
AITKEN, JM .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) :898-906