A TENSILE TESTING MACHINE FOR EVAPORATED THIN METAL-FILMS

被引:4
作者
YOSHII, K [1 ]
TAKAGI, H [1 ]
UMENO, M [1 ]
KAWABE, H [1 ]
机构
[1] OSAKA UNIV,FAC ENGN,DEPT PRECIS ENGN,SUITA,OSAKA 565,JAPAN
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1983年 / 16卷 / 02期
关键词
D O I
10.1088/0022-3735/16/2/005
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:127 / 130
页数:4
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