INSITU OBSERVATION OF RESISTIVITY OSCILLATION AT THE TI INSULATOR INTERFACE

被引:2
作者
IIDA, S
HIDEMURA, Y
HIGASHIMUKAI, K
NAGATA, S
机构
[1] Department of Electrical Engineering and Electronics, Osaka Sangyo University, Daito, Osaka, 574
关键词
D O I
10.1016/0169-4332(92)90342-U
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The resistivity of a very thin Ti film was shown to have oscillating characteristics which were dependent on the film thickness at room temperature. These resistivity oscillations were previously reported as a QSE, and found to occur at very low temperatures. Reasons for the oscillations, e.g., gas adsorption, film structure changes, as well as CSE were investigated, with experimental results showing there was no relationship between these factors and the resistivity oscillation phenomenon. The film's surface condition, i.e., its roughness, was determined to have a slight relationship to the oscillations, thus these oscillation modes are considered to be a new conduction phenomenon in room temperature thin films.
引用
收藏
页码:811 / 815
页数:5
相关论文
共 9 条
[1]  
ERTH G, 1982, PHYS REV LETT, V49, P177
[2]  
FAVENNEC M, 1972, THIN SOLID FILMS, V13, P73
[3]  
Fucks K., 1938, P CAMBRIDGE PHILOS S, V34, P100
[4]   SIZE EFFECTS IN METALLIC THIN-FILMS [J].
GOVINDARAJ, G ;
DEVANATHAN, V .
PHYSICAL REVIEW B, 1985, 32 (04) :2628-2630
[5]   OBSERVATION OF THE SURFACE AND STRUCTURE OF VERY THIN TI-FILM [J].
IIDA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (02) :L361-L363
[6]   KINETIC OSCILLATIONS IN THE CATALYTIC COOXIDATION ON PT(100) - EXPERIMENTS [J].
IMBIHL, R ;
COX, MP ;
ERTL, G .
JOURNAL OF CHEMICAL PHYSICS, 1986, 84 (06) :3519-3534
[7]   STRUCTURE DETERMINATION OF AN ADSORBATE-INDUCED MULTILAYER RECONSTRUCTION - (1X2)-H/NI(110) [J].
KLEINLE, G ;
PENKA, V ;
BEHM, RJ ;
ERTL, G ;
MORITZ, W .
PHYSICAL REVIEW LETTERS, 1987, 58 (02) :148-151
[8]  
SADOMIRSKII VB, 1967, SOV PHYS JETP, V25, P101
[9]   THE ELECTRON MEAN FREE-PATH (APPLICABLE TO QUANTITATIVE ELECTRON-SPECTROSCOPY) [J].
TOKUTAKA, H ;
NISHIMORI, K ;
HAYASHI, H .
SURFACE SCIENCE, 1985, 149 (2-3) :349-365