POSITION AND PRESSURE EFFECTS IN RF-MAGNETRON REACTIVE SPUTTER DEPOSITION OF PIEZOELECTRIC ZINC-OXIDE

被引：104
作者：
KRUPANIDHI, SB
SAYER, M
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 11期
关键词：
D O I：
10.1063/1.333895
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3308 / 3318
页数：11
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[1]   SURFACE PROCESSES IN GROWTH SILICON ON (111)SILICON IN ULTRAHIGH VACUUM [J].
ABBINK, HC ;
BROUDY, RM ;
MCCARTHY, GP .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (10) :4673-&
[2]   THE EFFECT OF O-2 ON REACTIVELY SPUTTERED ZINC-OXIDE [J].
AITA, CR ;
PURDES, AJ ;
LAD, RJ ;
FUNKENBUSCH, PD .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) :5533-5536
[3]   PIEZOELECTRIC ZNO TRANSDUCERS PRODUCED BY R.F. MAGNETRON SPUTTERING [J].
AMBERSLEY, MD ;
PITT, CW .
THIN SOLID FILMS, 1981, 80 (1-3) :183-195
[4]  
ARONOVICH J, 1979, J VAC SCI TECHNOL, V16, P994
[5]   HIGH-RATE PLANAR MAGNETRON DEPOSITION OF TRANSPARENT, CONDUCTING, AND HEAT REFLECTING FILMS ON GLASS AND PLASTIC [J].
BRETT, MJ ;
MCMAHON, RW ;
AFFINITO, J ;
PARSONS, RR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :352-355
[6]   PRODUCTION OF HIGH-ENERGY NEUTRAL ATOMS BY SCATTERING OF IONS AT SOLID SURFACES AND ITS RELATION TO SPUTTERING [J].
BRODIE, I ;
LAMONT, LT ;
JEPSEN, RL .
PHYSICAL REVIEW LETTERS, 1968, 21 (17) :1224-&
[7]   MONOLITHICALLY INTEGRATED BRAGG DEFLECTOR FOR AN OPTICAL GUIDED WAVE MADE OF ZINC-OXIDE FILM [J].
CHUBACHI, N ;
KUSHIBIK.J ;
KIKUCHI, Y .
ELECTRONICS LETTERS, 1973, 9 (10) :193-194
[8]   CRYSTALLOGRAPHIC ORIENTATION OF ZINC OXIDE FILMS DEPOSITED BY TRIODE SPUTTERING [J].
FOSTER, NF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :111-&
[9]  
GREENE JE, 1984, CRC CR REV SOL STATE, V11, P189
[10]   STRUCTURES AND ELECTRICAL PROPERTIES OF ZINC OXIDE FILMS PREPARED BY LOW PRESSURE SPUTTERING SYSTEM [J].
HADA, T ;
WASA, K ;
HAYAKAWA, S .
THIN SOLID FILMS, 1971, 7 (02) :135-&
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