INVESTIGATION OF LATTICE-DISTORTIONS IN INP CRYSTALS IMPLANTED WITH FE+ IONS BY MEANS OF HIGH-RESOLUTION X-RAY-DIFFRACTION AND X-RAY STANDING-WAVE METHODS

被引：14

作者：

BOCCHI, C ^{[1
]}

FRANZOSI, P ^{[1
]}

IMAMOV, RM ^{[1
]}

LOMOV, AA ^{[1
]}

MASLOV, AV ^{[1
]}

MUKHAMEDZHANOV, EK ^{[1
]}

YAKOVCHICK, YV ^{[1
]}

机构：

[1] RUSSIAN ACAD SCI,AV SHUBNIKOV CRYSTALLOG INST,MOSCOW 117333,RUSSIA

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 11期

关键词：

D O I：

10.1063/1.358005

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lattice distortions due the implantation of Fe+ ions in InP semi-insulating crystals have been investigated by means of high-resolution x-ray-diffraction and x-ray standing-wave methods. The effects of both the implantation dose and the annealing time were studied. It is shown that the x-ray standing-wave method provides valuable complementary information on strain and damage in the subsurface layer and permits one to distinguish between different distortion profiles that give practically the same kinematical diffraction curve. © 1994 American Institute of Physics.

引用

页码：7239 / 7245

页数：7

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