THE COMPOSITIONAL DEPENDENCE OF THE OPTICAL AND ELECTRICAL-PROPERTIES OF HYDROGENATED AMORPHOUS SI-GE FILMS PREPARED BY CO-SPUTTERING

被引：10
|
作者：
WEISZ, SZ
GOLDSTEIN, Y
GOMEZ, M
MUIR, JA
RESTO, O
PEREZ, R
机构：
来源：
THIN SOLID FILMS | 1984年 / 119卷 / 01期
关键词：
D O I：
10.1016/0040-6090(84)90157-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：59 / 65
页数：7
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