TECHNIQUES FOR THE GROWTH OF SUPERCONDUCTING OXIDE THIN-FILMS USING PURE OZONE VAPOR

被引：33

作者：

BERKLEY, DD ^{[1
]}

GOLDMAN, AM ^{[1
]}

JOHNSON, BR ^{[1
]}

MORTON, J ^{[1
]}

WANG, T ^{[1
]}

机构：

[1] UNIV MINNESOTA,CTR SCI & APPLICAT SUPERCOND,MINNEAPOLIS,MN 55455

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 12期

关键词：

D O I：

10.1063/1.1140488

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：3769 / 3774

页数：6

共 50 条

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[29] EFFECT OF OZONE ANNEALING ON THE DIELECTRIC-PROPERTIES OF TANTALUM OXIDE THIN-FILMS GROWN BY CHEMICAL VAPOR-DEPOSITION [J].

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