TECHNIQUES FOR THE GROWTH OF SUPERCONDUCTING OXIDE THIN-FILMS USING PURE OZONE VAPOR

被引:33
|
作者
BERKLEY, DD [1 ]
GOLDMAN, AM [1 ]
JOHNSON, BR [1 ]
MORTON, J [1 ]
WANG, T [1 ]
机构
[1] UNIV MINNESOTA,CTR SCI & APPLICAT SUPERCOND,MINNEAPOLIS,MN 55455
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 12期
关键词
D O I
10.1063/1.1140488
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:3769 / 3774
页数:6
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