Structural and optical properties of Zn-doped beta-Ga2O3 films

被引：28

作者：

Yue Wei ^{[1
]}

Yan Jinliang ^{[1
]}

Wu Jiangyan ^{[1
]}

Zhang Liying ^{[1
]}

机构：

[1] Ludong Univ, Sch Phys, Yantai 264025, Peoples R China

来源：

JOURNAL OF SEMICONDUCTORS | 2012年 / 33卷 / 07期

基金：

中国国家自然科学基金;

关键词：

transparent conductive oxides; Zn-doped beta-Ga2O3; optical transmittance; optical band gap; photoluminescence;

D O I：

10.1088/1674-4926/33/7/073003

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Intrinsic fi-Ga2O3 and Zn-doped beta-Ga2O3 films were prepared using RF magnetron sputtering. The effects of the Zn doping and thermal annealing on the structural and optical properties are investigated. In comparison with the intrinsic beta-Ga2O3 films, the microstructure, optical transmittance, optical absorption, optical energy gap, and photoluminescence of Zn-doped beta-Ga2O3 films change significantly. The post-annealed beta-Ga2O3 films are polycrystalline. After Zn doping, the crystallization deteriorates, the optical band gap shrinks, the transmittance decreases and the UV, blue, and green emission bands are enhanced.

引用

页数：4

共 50 条

[1] Structural and optical properties of Zn-doped β-Ga;O;films
岳伟
闫金良
吴江燕
张丽英
半导体学报, 2012, 33 (07) : 20 - 23
[2] Electrical properties and emission mechanisms of Zn-doped β-Ga2O3 films
Wang, X. H.
Zhang, F. B.
Saito, K.
Tanaka, T.
Nishio, M.
Guo, Q. X.
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2014, 75 (11) : 1201 - 1204
[3] OPTICAL AND MICROWAVE PROPERTIES OF TRIVALENT CHROMIUM IN BETA-GA2O3
TIPPINS, HH
PHYSICAL REVIEW, 1965, 137 (3A): : A865 - &
[4] ELECTRICAL PROPERTIES OF BETA-GA2O3
COJOCARU, LN
ALECU, ID
ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-FRANKFURT, 1973, 84 (5-6): : 325 - 331
[5] Spectroscopic analysis, structural, microstructural, optical and electrical properties of Zn-doped In2O3 thin films
Jothibas, M.
Manoharan, C.
Ramalingam, S.
Dhanapandian, S.
Bououdina, M.
SPECTROCHIMICA ACTA PART A-MOLECULAR AND BIOMOLECULAR SPECTROSCOPY, 2014, 122 : 171 - 178
[6] Structural, electronic, and optical properties of Zn-doped V2O5 thin films
Ikhlaq, Uzma
Sami, Samiullah
Khalil, Maria
Ullah, Farman
Ramay, Shahid M.
Ali, Shahzad Akhtar
Saleem, Murtaza
PHYSICA SCRIPTA, 2024, 99 (09)
[7] Electronic and optical properties of Zn-doped β-Ga2O3 Czochralski single crystals
Jesenovec, Jani
Varley, Joel
Karcher, Samuel E.
McCloy, John S.
JOURNAL OF APPLIED PHYSICS, 2021, 129 (22)
[8] Anisotropy of electrical and optical properties in beta-Ga2O3 single crystals
Ueda, N
Hosono, H
Waseda, R
Kawazoe, H
APPLIED PHYSICS LETTERS, 1997, 71 (07) : 933 - 935
[9] Optical and structural properties of Zn-doped lead iodide thin films
Bhavsar, DS
Saraf, KB
MATERIALS CHEMISTRY AND PHYSICS, 2003, 78 (03) : 630 - 636
[10] Electronic structures and optical properties of Zn-dopedβ-Ga2O3 with different doping sites
李超
闫金良
张丽英
赵刚
Chinese Physics B, 2012, 21 (12) : 430 - 435

← 1 2 3 4 5 →