共 18 条
- [5] NON-DESTRUCTIVE CHARACTERIZATION OF NITROGEN-IMPLANTED SILICON-ON-INSULATOR STRUCTURES BY SPECTROSCOPIC ELLIPSOMETRY [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1989, 2 (1-3): : 131 - 137
- [7] LAM HW, 1982, VLSI ELECTRONICS MIC, V4
- [8] LAM HW, 1985, VLSI HDB, P503
- [10] ELLIPSOMETRIC SPECTRA OF SILICON-ON-INSULATOR WAFERS [J]. APPLIED PHYSICS LETTERS, 1988, 52 (13) : 1050 - 1052