LOW-COST DIGITAL CONTROLLER FOR AN ELECTRON LITHOGRAPHY SYSTEM USING A SCANNING ELECTRON-MICROSCOPE

被引：2

作者：

SEILER, DG ^{[1
]}

CAMPBELL, CK ^{[1
]}

SUTHERS, MS ^{[1
]}

机构：

[1] MCMASTER UNIV,HAMILTON 16,ONTARIO,CANADA

来源：

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS AND CONTROL INSTRUMENTATION | 1976年 / 23卷 / 03期

关键词：

D O I：

10.1109/TIECI.1976.351401

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：325 / 328

页数：4

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PASIECZNIK BP, 1973, J VAC SCI TECHNOL, V10, P1012

[6] FABRICATION TECHNIQUES FOR SURFACE-ACOUSTIC-WAVE AND THIN-FILM OPTICAL DEVICES [J].

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[7] E-BEAM WRITING TECHNIQUES FOR SEMICONDUCTOR-DEVICE FABRICATION [J].

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