SECONDARY ION MASS-SPECTROMETRY ANALYSIS OF IMPURITY DISTRIBUTIONS ACROSS LIQUID-ENCAPSULATED CZOCHRALSKI GAAS WAFERS

被引：3
|
作者：
HOMMA, Y
ISHII, Y
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 06期
关键词：
D O I：
10.1063/1.334174
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1892 / 1894
页数：3
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