MOCVD OF CDS ONTO (111)SILICON SUBSTRATES

被引：12
|
作者：
BOONE, JL [1 ]
HOWARD, SA [1 ]
MARTIN, DD [1 ]
CANTWELL, G [1 ]
机构：
[1] EAGLES PICHER IND INC,MIAMI RES LAB,MIAMI,OK 74355
来源：
THIN SOLID FILMS | 1989年 / 176卷 / 01期
关键词：
D O I：
10.1016/0040-6090(89)90371-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：143 / 150
页数：8
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