PRESSURE-DEPENDENCE OF ELECTRON-TEMPERATURE USING RF-FLOATED ELECTROSTATIC PROBES IN RF PLASMAS

被引：30

作者：

CANTIN, A ^{[1
]}

GAGNE, RRJ ^{[1
]}

机构：

[1] UNIV LAVAL,DEPT ELECT ENGN,QUEBEC CITY 10,QUEBEC,CANADA

来源：

APPLIED PHYSICS LETTERS | 1977年 / 30卷 / 07期

关键词：

D O I：

10.1063/1.89406

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：316 / 319

页数：4

共 15 条

[1] SPATIAL DISTRIBUTION OF ELECTRON DENSITY AND ELECTRIC FIELD STRENGTH IN A HIGH-FREQUENCY DISCHARGE . CRITERIA FOR SIMILARITY [J].

BELL, AT .

INDUSTRIAL & ENGINEERING CHEMISTRY FUNDAMENTALS, 1970, 9 (01) :160-&

[2] INHERENT DIFFICULTIES IN USE OF ELECTROSTATIC PROBES IN RADIO FREQUENCY PLASMA [J].

CANTIN, A ;

GAGNE, RRJ .

NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA B-GENERAL PHYSICS RELATIVITY ASTRONOMY AND MATHEMATICAL PHYSICS AND METHODS, 1970, 66 (02) :193-&

[3] PROPER USE OF ELECTROSTATIC PROBES IN ELECTRODELESS RF PLASMAS [J].

CANTIN, A ;

GAGNE, RRJ .

IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 1968, AP16 (02) :279-&

[4]

CANTIN A, 1974, IEE118 C PUBL, P625

[5]

CANTIN A, 1973, NUOVO CIMENTO, V69, P115

[6]

DZERPETOV KA, 1955, SOV PHYS JETP, V1, P326

[7]

ENGEL AV, 1965, IONIZED GASES, P242

[8] INVESTIGATION OF AN RF PLASMA WITH SYMMETRICAL AND ASYMMETRICAL ELECTROSTATIC PROBES [J].

GAGNE, RRJ ;

CANTIN, A .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) :2639-&

[9]

GRIGOROV G, 1966, INT J ELECTRON, V20, P363

[10] PROBE MEASUREMENTS IN AN ELECTRODELESS DISCHARGE [J].

KEEFER, DR ;

CLARKSON, MH ;

MATHEWS, BE .

AIAA JOURNAL, 1966, 4 (10) :1850-&

← 1 2 →