COBALT DISILICIDE EPITAXIAL-GROWTH ON THE SILICON (111) SURFACE

被引:117
|
作者
PIRRI, C [1 ]
PERUCHETTI, JC [1 ]
GEWINNER, G [1 ]
DERRIEN, J [1 ]
机构
[1] CNRS,ETUD PROPRIETES ELECTR SOLIDES LAB,F-38042 GRENOBLE,FRANCE
来源
PHYSICAL REVIEW B | 1984年 / 29卷 / 06期
关键词
D O I
10.1103/PhysRevB.29.3391
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:3391 / 3397
页数:7
相关论文
共 50 条
  • [21] SELECTIVE EPITAXIAL-GROWTH OF SILICON
    OSENBACH, JW
    SCHIMMEL, DG
    FEYGENSON, A
    BASTEK, JJ
    TSAI, JCC
    PRAEFCKE, HC
    BONATO, EW
    JOURNAL OF MATERIALS RESEARCH, 1991, 6 (11) : 2318 - 2323
  • [22] HYDROGEN SURFACE COVERAGE - RAISING THE SILICON EPITAXIAL-GROWTH TEMPERATURE
    WOLFF, SH
    WAGNER, S
    BEAN, JC
    HULL, R
    GIBSON, JM
    APPLIED PHYSICS LETTERS, 1989, 55 (19) : 2017 - 2019
  • [24] EPITAXIAL-GROWTH OF SPHALERITE AND WURTZITE ZNSE ON A (111) GE SURFACE - COMMENT
    HOLT, DB
    JOURNAL OF APPLIED PHYSICS, 1974, 45 (02) : 966 - 967
  • [25] EPITAXIAL-GROWTH OF CHROMIUM ON CU(111) SUBSTRATES
    GAIGHER, HL
    VANDERBERG, NG
    MALHERBE, JB
    THIN SOLID FILMS, 1985, 128 (1-2) : 139 - 148
  • [26] INCOMMENSURATE EPITAXIAL-GROWTH OF CU ON PD(111)
    LI, H
    TIAN, D
    JONA, F
    MARCUS, PM
    SOLID STATE COMMUNICATIONS, 1991, 77 (09) : 651 - 655
  • [27] THE EPITAXIAL-GROWTH OF VANADIUM ON CU(111) SUBSTRATES
    GAIGHER, HL
    VANDERBERG, NG
    THIN SOLID FILMS, 1991, 196 (01) : 111 - 120
  • [28] SILICON EPITAXIAL-GROWTH USING DICHLOROSILANE
    ROBINSON, PH
    GOLDSMIT.N
    JOURNAL OF ELECTRONIC MATERIALS, 1974, 3 (04) : 855 - 856
  • [29] ROLE OF ETCHING IN EPITAXIAL-GROWTH OF SILICON
    RAO, PVS
    VARKER, CJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (08) : C256 - C256
  • [30] EPITAXIAL-GROWTH OF INSB (111) ON SAPPHIRE (0001)
    JAMISON, KD
    BENSAOULA, A
    IGNATIEV, A
    HUANG, CF
    CHAN, WS
    APPLIED PHYSICS LETTERS, 1989, 54 (19) : 1916 - 1917