HIGH-RESOLUTION DEPOSITION AND ETCHING OF METALS WITH A SCANNING ELECTROCHEMICAL MICROSCOPE

被引：62
作者：
HUSSER, OE
CRASTON, DH
BARD, AJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期
关键词：
D O I：
10.1116/1.584191
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：1873 / 1876
页数：4
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