INVESTIGATIONS BY SIMS OF THE BULK IMPURITY DIFFUSION OF GE IN SI

被引：57
作者：
DORNER, P
GUST, W
PREDEL, B
ROLL, U
LODDING, A
ODELIUS, H
机构：
[1] MAX PLANCK INST MET FORSCH,D-7000 STUTTGART 1,FED REP GER
[2] INST MET KUNDE,D-7000 STUTTGART 1,FED REP GER
[3] CHALMERS UNIV TECHNOL,DEPT PHYS,S-41296 GOTHENBURG,SWEDEN
来源：
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 1984年 / 49卷 / 04期
关键词：
D O I：
10.1080/01418618408236556
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：557 / 571
页数：15
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