INVESTIGATIONS BY SIMS OF THE BULK IMPURITY DIFFUSION OF GE IN SI

被引：57
作者：
DORNER, P
GUST, W
PREDEL, B
ROLL, U
LODDING, A
ODELIUS, H
机构：
[1] MAX PLANCK INST MET FORSCH,D-7000 STUTTGART 1,FED REP GER
[2] INST MET KUNDE,D-7000 STUTTGART 1,FED REP GER
[3] CHALMERS UNIV TECHNOL,DEPT PHYS,S-41296 GOTHENBURG,SWEDEN
来源：
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 1984年 / 49卷 / 04期
关键词：
D O I：
10.1080/01418618408236556
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：557 / 571
页数：15
相关论文
共 15 条
[1]  
BOURGOIN J, 1976, 19TH C MET CTR ET NU, V11, P695
[2]   SIMS(SECONDARY-ION-MASS-SPECTROMETRY) STUDIES ON VOLUME DIFFUSION OF AL INTO GE [J].
DORNER, P ;
GUST, W ;
LODDING, A ;
ODELIUS, H ;
PREDEL, B ;
ROLL, U .
ACTA METALLURGICA, 1982, 30 (05) :941-946
[3]  
DORNER P, 1982, Z METALLKD, V73, P325
[4]   SIMS INVESTIGATIONS ON THE DIFFUSION OF CU IN AG SINGLE-CRYSTALS [J].
DORNER, P ;
GUST, W ;
HINTZ, MB ;
LODDING, A ;
ODELIUS, H ;
PREDEL, B .
ACTA METALLURGICA, 1980, 28 (03) :291-300
[5]  
DORNER P, 1984, UNPUB
[6]  
DUCKWORTH HE, 1960, MASS SPECTROSCOPY
[7]   SELF-INTERSTITIALS AND VACANCIES IN ELEMENTAL SEMICONDUCTORS BETWEEN ABSOLUTE-ZERO AND THE TEMPERATURE OF MELTING [J].
FRANK, W .
FESTKORPERPROBLEME-ADVANCES IN SOLID STATE PHYICS, 1981, 21 :221-242
[8]  
HETTICH G, 1979, I PHYS C SER, V46, P500
[9]   SELF-DIFFUSION IN INTRINSIC SILICON [J].
KALINOWSKI, L ;
SEGUIN, R .
APPLIED PHYSICS LETTERS, 1979, 35 (03) :211-213
[10]   DIFFUSION OF GERMANIUM IN SILICON [J].
MCVAY, GL ;
DUCHARME, AR .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (03) :1409-1410
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