SURFACE PHOTOCHEMICAL PHENOMENA IN LASER CHEMICAL VAPOR-DEPOSITION

被引：32
作者：
HIGASHI, GS
ROTHBERG, LJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 05期
关键词：
D O I：
10.1116/1.582966
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：1460 / 1463
页数：4
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