A COMPARISON OF GETTERING TECHNIQUES FOR VERY LARGE-SCALE INTEGRATION

被引：31

作者：

CEROFOLINI, GF

POLIGNANO, ML

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 02期

关键词：

D O I：

10.1063/1.333066

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：579 / 585

页数：7

共 20 条

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