HIGH-ENERGY LITHOGRAPHY ILLUMINATION BY OXFORDS SYNCHROTRON - A COMPACT SUPERCONDUCTING SYNCHROTRON X-RAY SOURCE

被引：5
|
作者：
ANDREWS, DE
WILSON, MN
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期
关键词：
D O I：
10.1116/1.584485
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1696 / 1701
页数：6
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