SIMS ANALYSIS, UNDER CESIUM BOMBARDMENT, OF SI IN GAAS (AL, GA)AS SUPERLATTICES - DETECTION LIMIT AND DEPTH RESOLUTION

被引：9

作者：

GAUNEAU, M ^{[1
]}

CHAPLAIN, R ^{[1
]}

REGRENY, A ^{[1
]}

SALVI, M ^{[1
]}

GUILLEMOT, C ^{[1
]}

AZOULAY, R ^{[1
]}

DUHAMEL, N ^{[1
]}

机构：

[1] CTR NATL ETUD TELECOMMUN,PAB OMC,F-92220 BAGNEUX,FRANCE

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 11卷 / 11期

关键词：

D O I：

10.1002/sia.740111102

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：545 / 552

页数：8

共 19 条

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