Influence of Ni Schottky contact thickness on two-dimensional electron-gas sheet carrier concentration of strained Al0.3Ga0.7N/GaN heterostructures

被引:10
作者
Zhao Jianzhi [1 ]
Lin Zhaojun [1 ]
Lu Yuanjie [1 ]
Timothy, Corrigan [2 ]
Meng Lingguo [1 ]
Zhang Yu [1 ]
Wang Zhanguo [3 ]
Chen Hong [4 ]
机构
[1] Shandong Univ, Sch Phys, Jinan 250100, Peoples R China
[2] Univ Maryland, Dept Phys, College Pk, MD 20740 USA
[3] Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China
[4] Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100080, Peoples R China
基金
中国国家自然科学基金;
关键词
AlGaN/GaN heterostructure; Schottky contact thicknesses; two dimensional electron gas; tensile stress;
D O I
10.1088/1674-4926/31/8/084007
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Ni/Au Schottky contacts with thicknesses of either 50 angstrom/50 angstrom or 600 angstrom/ 2000 angstrom were deposited on strained Al (0.3) Ga (0 .7) N/GaN heterostructures. Using the measured C-V curves and I-V characteristics at room temperature, the calculated density of the two-dimensional electron-gas (2DEG) of the 600 angstrom/2000 angstrom thick Ni/Au Schottky contact is about 9.13 x 10(-12) cm(-2) and that of the 50 angstrom/50 A thick Ni/Au Schottky contact is only about 4.77 x 10(-12) cm(-2). The saturated current increases from 60.88 to 86.34 mA at a bias of 20 V as the thickness of the Ni/Au Schottky contact increases from 50 angstrom/50 angstrom to 600 angstrom/2000 angstrom. By self-consistently solving Schrodinger's and Poisson's equations, the polarization charge sheet density of the two samples was calculated, and the calculated results show that the polarization in the AlGaN barrier layer for the thick Ni/Au Schottky contact is stronger than the thin one. Thus, we attribute the results to the increased biaxial tensile stress in the Al-0.3 Ga-0.7 N barrier layer induced by the 600 angstrom/2000 angstrom thick Ni/Au Schottky contact.
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页数:4
相关论文
共 16 条
  • [1] Two-dimensional electron gases induced by spontaneous and piezoelectric polarization charges in N- and Ga-face AlGaN/GaN heterostructures
    Ambacher, O
    Smart, J
    Shealy, JR
    Weimann, NG
    Chu, K
    Murphy, M
    Schaff, WJ
    Eastman, LF
    Dimitrov, R
    Wittmer, L
    Stutzmann, M
    Rieger, W
    Hilsenbeck, J
    [J]. JOURNAL OF APPLIED PHYSICS, 1999, 85 (06) : 3222 - 3233
  • [2] Two dimensional electron gases induced by spontaneous and piezoelectric polarization in undoped and doped AlGaN/GaN heterostructures
    Ambacher, O
    Foutz, B
    Smart, J
    Shealy, JR
    Weimann, NG
    Chu, K
    Murphy, M
    Sierakowski, AJ
    Schaff, WJ
    Eastman, LF
    Dimitrov, R
    Mitchell, A
    Stutzmann, M
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 87 (01) : 334 - 344
  • [3] Optical constants of epitaxial AlGaN films and their temperature dependence
    Brunner, D
    Angerer, H
    Bustarret, E
    Freudenberg, F
    Hopler, R
    Dimitrov, R
    Ambacher, O
    Stutzmann, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 82 (10) : 5090 - 5096
  • [4] THE INFLUENCE OF THE STRAIN-INDUCED ELECTRIC-FIELD ON THE CHARGE-DISTRIBUTION IN GAN-ALN-GAN STRUCTURE
    BYKHOVSKI, A
    GELMONT, B
    SHUR, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (11) : 6734 - 6739
  • [5] High breakdown voltage achieved on AlGaN/GaN HEMTs with integrated slant field plates
    Dora, Y.
    Chakraborty, A.
    McCarthy, L.
    Keller, S.
    DenBaars, S. P.
    Mishra, U. K.
    [J]. IEEE ELECTRON DEVICE LETTERS, 2006, 27 (09) : 713 - 715
  • [6] Jeon M C, 2005, APPL PHYS LETT, V86
  • [7] AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors on SiC substrates
    Khan, MA
    Hu, X
    Tarakji, A
    Simin, G
    Yang, J
    Gaska, R
    Shur, MS
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (09) : 1339 - 1341
  • [8] The influence of Schottky contact metals on the strain of AlGaN barrier layers
    Lin, Zhaojun
    Zhao, Jianzhi
    Corrigan, Timothy D.
    Wang, Zhen
    You, Zhidong
    Wang, Zhanguo
    Lu, Wu
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 103 (04)
  • [9] Influence of Ni Schottky contact area on two-dimensional electron-gas sheet carrier concentration of strained AlGaN/GaN heterostructures
    Lin, ZJ
    Lu, W
    [J]. JOURNAL OF APPLIED PHYSICS, 2006, 99 (01)
  • [10] Barrier heights of Schottky contacts on strained AlGaN/GaN heterostructures: Determination and effect of metal work functions
    Lin, ZJ
    Lu, W
    Lee, J
    Liu, DM
    Flynn, JS
    Brandes, GR
    [J]. APPLIED PHYSICS LETTERS, 2003, 82 (24) : 4364 - 4366