SPUTTERING PREPARATION OF FERROELECTRIC PLZT THIN-FILMS AND THEIR OPTICAL APPLICATIONS

被引：59
|
作者：
ADACHI, H
WASA, K
机构：
[1] The Central Research Laboratories, Matsushita Electrical Industrial Co., Ltd., Moriguchi
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1991年 / 38卷 / 06期
关键词：
D O I：
10.1109/58.108865
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Preparation of epitaxial PLZT thin films on sapphire has been investigated, and excellent ferroelectric properties such as piezoelectricity and electrooptic effect with high transparency were obtained in thin films. Moreover, preparation process has been developed by multitarget sputtering method, and strict control of film composition and epitaxial growth with the buffer layer of graded composition were performed. Using these PLZT thin films, some optical applications, acoustooptic deflector and electrooptic guided-light switch, were shown.
引用
收藏
页码：645 / 655
页数：11
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