SELECTIVE MOCVD GROWTH OF GAALAS ON PARTLY MASKED SUBSTRATES AND ITS APPLICATION TO OPTOELECTRONIC DEVICES

被引:41
作者
TAKAHASHI, Y [1 ]
SAKAI, S [1 ]
UMENO, M [1 ]
机构
[1] NAGOYA INST TECHNOL,DEPT ENGN SCI,SHOWA KU,NAGOYA,AICHI 466,JAPAN
关键词
D O I
10.1016/0022-0248(84)90418-4
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:206 / 213
页数:8
相关论文
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