MEGAVOLT ELECTRON-IRRADIATION INDUCED REGROWTH OF AMORPHOUS ZONES IN SILICON

被引：5
|
作者：
WASHBURN, J
SADANA, DK
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 05期
关键词：
D O I：
10.1063/1.332351
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2380 / 2382
页数：3
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