A MODEL OF SPUTTERING FROM SPIKES

被引：24
作者：
SZYMONSKI, M
PORADZISZ, A
机构：
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1982年 / 28卷 / 03期
关键词：
D O I：
10.1007/BF00617983
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：175 / 178
页数：4
相关论文
共 18 条
[1]   THE EFFECT OF ION MASS AND TARGET TEMPERATURE ON THE ENERGY-DISTRIBUTION OF SPUTTERED ATOMS [J].
AHMAD, S ;
FARMERY, BW ;
THOMPSON, MW .
NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3) :327-330
[2]  
Behrisch R., 1981, TOPICS APPL PHYS, V47
[3]  
CHAPMAN GE, 1972, RADIAT EFF, V13, P121
[4]  
CLAUSSEN C, 1981, COMMUNICATION
[5]   THERMAL EFFECTS IN SPUTTERING [J].
KELLY, R .
SURFACE SCIENCE, 1979, 90 (02) :280-318
[6]   THEORY OF THERMAL SPUTTERING [J].
KELLY, R .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 32 (1-2) :91-100
[7]  
Landau L.D., 2013, COURSE THE ORETICAL
[8]   AN INVESTIGATION OF THERMAL SPIKES BY STUDYING HIGH ENERGY SPUTTERING OF METALS AT ELEVATED TEMPERATURES [J].
NELSON, RS .
PHILOSOPHICAL MAGAZINE, 1965, 11 (110) :291-&
[9]   TIME EVOLUTION OF COLLISION-INDUCED HOT SPIKES [J].
SANDERS, JB .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 51 (1-2) :43-48
[10]  
SIGMUND P, 1972, REV ROUM PHYS, V17, P1079
12