INTRINSIC STRESS IN EVAPORATED METAL FILMS

被引:179
作者
KLOKHOLM, E
BERRY, BS
机构
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D O I
10.1149/1.2411441
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:823 / &
相关论文
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