INTRINSIC STRESS IN EVAPORATED METAL FILMS

被引:179
作者
KLOKHOLM, E
BERRY, BS
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D O I
10.1149/1.2411441
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:823 / &
相关论文
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  • [1] ANDERSON J, 1966, USE THIN FILMS PHYSI, P261
  • [2] GUNTHER G, 1966, BASIC PROBLEMS THIN, P231
  • [3] HASS G, 1966, PHYSICS THIN FILM ED, V3, P211
  • [4] Hoffman R. W., 1966, PHYS THIN FILMS, VVol. 3, pp. 211
  • [5] HOFFMAN RW, 1964, THIN FILMS, P99
  • [6] HOFFMAN RW, 1967, MEAS TECH, P312
  • [7] HOFFMAN RW, 1966, USE THIN FILMS PHYSI, P261
  • [8] NIEDERMAYER R, 1966, BASIC PROBLEMS TH ED, P231
  • [9] SCHWARTZ B, 1967, MEASUREMENT TECHN ED, P312
  • [10] Shewmon P.G., 1963, DIFFUSION SOLIDS, P65