DYNAMIC IMAGING MICROELLIPSOMETRY - THEORY, SYSTEM-DESIGN, AND FEASIBILITY DEMONSTRATION

被引：54

作者：

COHN, RF ^{[1
]}

WAGNER, JW ^{[1
]}

KRUGER, J ^{[1
]}

机构：

[1] JOHNS HOPKINS UNIV, DEPT MAT SCI & ENGN, BALTIMORE, MD 21218 USA

来源：

APPLIED OPTICS | 1988年 / 27卷 / 22期

关键词：

D O I：

10.1364/AO.27.004664

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：4664 / 4671

页数：8

共 14 条

[1]

Azzam RMA., 1999, ELLIPSOMETRY POLARIZ

[2] DYNAMIC IMAGING MICROELLIPSOMETRY - PROOF OF CONCEPT TEST-RESULTS [J].

COHN, RF ;

WAGNER, JW ;

KRUGER, J .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (04) :1033-1034

[3]

DAHLQUIST G, 1974, NUMERICAL METHODS, P30

[4]

DUNLAVY DJ, 1981, LAUR811806 LOS AL NA

[5] SPATIALLY RESOLVED ELLIPSOMETRY [J].

ERMAN, M ;

THEETEN, JB .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (03) :859-873

[6]

HAUGE P, 1973, IBM J RES DEV NOV, P472

[7] OPTICAL SOL-GEL COATINGS - ELLIPSOMETRY OF FILM FORMATION [J].

HURD, AJ ;

BRINKER, CJ .

JOURNAL DE PHYSIQUE, 1988, 49 (06) :1017-1025

[8]

KRUGER J, 1973, ADV ELECTROCHEMISTRY, V9

[9]

McBee C. L., 1974, LOCALIZED CORRO NACE, P252

[10] ELLIPSOMETRIC-SPECTROSCOPY OF FILMS FORMED ON METALS IN SOLUTION [J].

MCBEE, CL ;

KRUGER, J .

SURFACE SCIENCE, 1969, 16 :340-&

← 1 2 →