AUGER-ELECTRON SPECTROSCOPY AT HIGH SPATIAL-RESOLUTION AND NA PRIMARY BEAM CURRENTS

被引：25
作者：
TODD, G
POPPA, H
MOORHEAD, D
BALES, M
机构：
[1] NASA,AMES RES CTR,MOFFETT FIELD,CA 94035
[2] UNIV CALIF,ELECT ENGN DEPT,BERKELEY,CA 94720
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 04期
关键词：
D O I：
10.1116/1.568708
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：953 / 955
页数：3
相关论文
共 15 条
[1]   USE OF SCANNING AUGER MICROSCOPY IN MOLECULAR-BEAM EPITAXY OF GAAS AND GAP [J].
ARTHUR, JR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01) :136-139
[2]  
BOTTOMS WR, 1972, SCANNING ELECTRON MI, P182
[3]  
Brandis E. K., 1975, Scanning Electron Microscopy 1975, P141
[4]  
BRANDIS EK, 1971, SEM 1971 1, P505
[5]  
Christou A., 1975, Scanning Electron Microscopy 1975, P149
[6]  
ECKSTEIN W, 1972, VACUUM, V23, P159
[7]   ANALYSIS OF MATERIALS BY ELECTRON-EXCITED AUGER ELECTRONS [J].
HARRIS, LA .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (03) :1419-&
[8]   AUGER ELECTRON SPECTROSCOPY IN SCANNING ELECTRON MICROSCOPE - AUGER ELECTRON IMAGES [J].
MACDONALD, NC ;
WALDROP, JR .
APPLIED PHYSICS LETTERS, 1971, 19 (09) :315-+
[9]  
MACDONALD NC, 1971, SCANNING ELECTRON MI, P89
[10]  
MACDONALD NC, 1970, SCANNING ELECTRON MI, P25
12