A SILICON SUSCEPTOR FOR MOCVD

被引:0
|
作者
BLAAUW, C
SPRINGTHORPE, AJ
EMMERSTORFER, B
MINER, C
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 02期
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D O I
10.1116/1.573237
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:438 / 439
页数:2
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